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News Academy of Engineering Sciences A.M. Prokhorov

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Mathematical modeling of metrological characteristics of manovacuumm eter constructed on electromagnetic wave resonator basis
V.A. Buzanovskii

Theoretical consideration of the basic metrological characteristics
of the manovacuummeter constructed on the electromagnetic
wave resonator basis is carried out in the article. Mathematical expressions
for the real and nominal static transformation functions
of this device, mathematical expressions for the measurement
sensitivity of pressure and vacuum, mathematical expressions
for the estimation of absolute and relative measurement errors of
pressure and vacuum, mathematical expressions for the estimation
of systematic and casual components of a relative measurement
error of pressure and vacuum are developed. The analysis
of the developed mathematical description is carried out. The
results of the analysis are the determination of the basic sources
of measurement error – deviations from nominal values of 1) the
distance between plates of resonator, 2) the diameter of a «thin»
plate of resonator, 3) the thickness of a «thin» plate of resonator,
4) the speed of electromagnetic waves in the environment filling
the resonator, 5) the transformation function of detector-amplifier,
6) the transformation function of amplitude-frequency analyzer.
Key words: manovacuummeter, pressure, vacuum, resonator,
electromagnetic wave, metrological characteristic, static transformation
function, measurement sensitivity, measurement error.

Contacts: E-mail: vab1960@rambler.ru

Pp. 38-47.

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