News Academy of Engineering Sciences A.M. Prokhorov Annotation << Back COMPUTER SIMULATION OF THE SYNTHESISOF NANO-DIMENSIONAL FILMS V.I. MARGOLIN, L.Y. AMMON, D.A. BABICHEV, V.S. FANTIKOV, CHU CHONG SHY Modeling of processes and dynamics of nucleation and growth of nanoparticles on the substrate allows us to predict the structure of nano-dimensional fi lms and such parameters of the system, in which will get the right architecture. Method of diff usion-limited aggregation model the processes of synthesis of nano-dimensional fi lms on a substrate based on the structure of fi lm-forming molecules. We consider nanometer scale processes of thin fi lm growth by thermal vacuum deposition (TVD) in diff erent arrangements and conditions. Is shown as aff ecting the quality of the resulting coating fi lms. When the intermediate gear of thin fi lm growth process is based on Monte-Carlo simulation. Fractal growth process observed in any of the following conditions. Discussed in the presence of control and management of the process of thin fi lm growth. Keywords: nano-dimensional film, fractals, diffusion limited aggregation, vacuum deposition, synthesis, Monte-Carlo simulation. Contacts: E-mail: v.margolin@mail.ru Pp. 07-13.